Air Products introduces XeF₂ into portfolio

© Air Products
Xenon difluoride becomes the latest addition to the production line.

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Air Products has opted to add xenon difluoride (XeF₂) to its portfolio of electronic materials. The company hopes to utilise its 35 years of expertise in fluorine and xenon to serve the burgeoning XeF₂ market.

XeF₂ is mainly used as an etching gas, primarily in the Micro Electro Mechanical Systems (MEMS) market. Xenon difluoride provides manufacturers with a high selectivity to silicon versus SiO₂ and other materials.

Tim Maykut, Commercial Development Manager for Air Products, stated, “Our experience in chemical synthesis has shown that the continuous, flow-through process we developed can deliver quality material at the high volumes needed to match the growth potential of the MEMS market.”

Maykut continued, “Additionally, our deep understanding of etching process applications and supply of other etch materials provides further value to any XeF₂ user. Also our packaging and delivery expertise support an easy integration of this material to customers’ equipment.”

In anticipation of the new addition, Air Products has built a pilot plant capable of producing up to 300 kilograms per year. The company is confident that this production technology can be quickly scaled to metric capabilities.

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