Brooks Instrument has expanded its GF 40/80 Series portfolio of thermal mass flow controllers with a number of product upgrades.

Broader capabilities, including increased flow rates up to 50 slpm and a ‘normally open’ valve for non-hazardous gas applications, are seen as ideal upgrades for users of Aera (Hitachi), Celerity, Tylan, Mykrolis, Millipore and Unit mass flow controllers, as well as other competitive devices.


The GF 40/80 Series offers long-term zero stability at less than 0.5% per year, with this specification ensuring the device will return more reliable accuracy data for a longer period of time, giving users greater confidence in the numbers reported. The GF 40/80 Series is also available with Brooks’ patented MultiFlo™, a powerful technology that enables users to re-program the gas and/or range in minutes without the trouble and cost of removing the mass flow controller from service. Brooks has now expanded the flow rates for the GF 40/80 Series from 30 slpm to 50 slpm, making the devices an ‘excellent choice’ for applications that require a higher flow rate with the flexibility of a MultiFlo-capable mass flow controller.

Newly expanded RS485 communication protocols also increase the flexibility and application range of the GF 40/80 Series. These versions of the RS485 protocols are ideal for users of Aera (Hitachi), Celerity, Tylan, Mykrolis, Millipore and Unit mass flow controllers, which are now part of the Brooks product line following its acquisition of Celerity Instrumentation in 2009. End-users can now upgrade to a device that offers better accuracy and repeatability while keeping the same communication protocols.


The GF 40/80 Series also integrates the EtherCAT communication protocol, which is a high-performance, ethernet-based fieldbus system designed for process control applications requiring short data update times with low communication ‘jitter’. Adopted by leading-edge technology companies, EtherCAT makes it easier to network instrumentation for advanced process control and diagnostics capabilities.



The GF 40 is now equipped with a ‘normally open’ valve for non-hazardous gas applications that require a fully open valve in the event of a process interruption, while the GF 80 also features a new Teflon® valve seat allowing it to be used in applications for corrosive and reactive gases..

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