Demonstrating up to 50 percent energy savings, compact dimensions and high pumping speeds, the A 100 L dry pumps from Pfeiffer Vacuum are specially developed for flexible integration in semiconductor production facilities.
The dry multi-stage Roots pumps are ideal for clean applications such as load-lock chambers and transfer chambers, as well as for all other non-corrosive applications.
Despite their compact dimensions, the pumps provide high pumping speeds and short pump down times and are suitable for operation in cleanrooms.
The further development of the range, the A 100 L ES pumps, cut energy consumption by up to 50 percent. Its pumping speed is significantly higher in the low pressure range, while additional benefits include a lower final pressure and reduced noise level. The innovative and fully integrated ES module reduces energy use to a minimum in the low pressure range, which significantly reduces operating costs. To illustrate this, annual savings per pump total up to 7,900 kWh, corresponding to 3.9 tons of CO2.
At a typical 300mm semiconductor fab level equipped with 1,300 load-lock pumps, Pfeiffer Vacuum explains that the energy saving adds up to 10 GWh, or 5,100 tons of CO2 per year.
In addition to energy savings, the final pressure of the A 100 L ES is reduced to 7x10-4 mbar (hPa). This opens up new potential applications requiring an enhanced pumping capacity combined with low pressure. The A 100 L ES rounds off the company’s energy-saving product family of medium duty process pumps in the A3P series and the harsh duty process pumps in the A3H series.
Electronic Fluorocarbons (EFC), headquartered in Massachusetts, utilizes the latest technology for the purification and microanalysis of its legacy fluorinated specialty gases and rare gases for the medical and electronics semiconductor manufacturing industries.
As we head in to 2018, we look back on a very interesting changing market for krypton (Kr), xenon (Xe) and neon (Ne) in 2017. Ne supply this year continued to increase as new plants came on-stream while the demand was growing slowly after the big decline of 2016.
Sherwood Valve, LLC has launched the company’s new, comprehensive 80+ page compressed gas catalog including industrial gas valves, medical valves, propane cylinder valves, alternative energy valves, specialty valves and pressure relief devices.
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