Demonstrating up to 50 percent energy savings, compact dimensions and high pumping speeds, the A 100 L dry pumps from Pfeiffer Vacuum are specially developed for flexible integration in semiconductor production facilities.

The dry multi-stage Roots pumps are ideal for clean applications such as load-lock chambers and transfer chambers, as well as for all other non-corrosive applications.

Despite their compact dimensions, the pumps provide high pumping speeds and short pump down times and are suitable for operation in cleanrooms.

The further development of the range, the A 100 L ES pumps, cut energy consumption by up to 50 percent. Its pumping speed is significantly higher in the low pressure range, while additional benefits include a lower final pressure and reduced noise level. The innovative and fully integrated ES module reduces energy use to a minimum in the low pressure range, which significantly reduces operating costs. To illustrate this, annual savings per pump total up to 7,900 kWh, corresponding to 3.9 tons of CO2.

At a typical 300mm semiconductor fab level equipped with 1,300 load-lock pumps, Pfeiffer Vacuum explains that the energy saving adds up to 10 GWh, or 5,100 tons of CO2 per year.

In addition to energy savings, the final pressure of the A 100 L ES is reduced to 7x10-4 mbar (hPa). This opens up new potential applications requiring an enhanced pumping capacity combined with low pressure. The A 100 L ES rounds off the company’s energy-saving product family of medium duty process pumps in the A3P series and the harsh duty process pumps in the A3H series.