Tiger Optics today said it was honored to participate in the process tied to the revision of a key semiconductor industry standard for monitoring moisture dry-down characteristics of gas delivery systems.

As laser-based methods achieve greater acceptance, they are replacing incumbent methods as standards in a host of industries. The new SEMI F112 standard, published last month by Semiconductor Equipment and Material International (SEMI), identifies Cavity Ring-Down Spectroscopy (CRDS) as the technique for users to qualitatively assess and rank gas delivery systems of different designs. In so doing, CRDS replaces Atmospheric Pressure Ionisation Mass Spectrometry (APIMS) as the trace-level moisture detector prescribed for this test method.

Tiger Optics, a leading manufacturer of trace-gas analysers for the world’s leading semiconductor fabrication plants, ultra-high-purity gas manufacturers and makers of related components, utilises Continuous Wave Cavity Ring-Down Spectroscopy (CW CRDS) for its analysers.  Based in Warrington, Pennsylvania, Tiger Optics introduced the first CW-CRDS analyzers in 2001. Since then, it has developed a variety of platforms, from compact, single analyte detectors to broadband, multi-species monitors. Today, over 1,600 of the company’s tools are deployed in industrial settings and metrology institutes around the world. 

SEMI, organised in 1970 to promote the semiconductor equipment and materials industry, functions as the voice of that global enterprise. SEMI standards—filling 16 volumes at present—are voluntary technical agreements between suppliers and customers, designed to ensure compatibility and inter-operability of goods and services. As with all SEMI standards, F112 evolved from the work of a task force that had to win consensus of other SEMI members not directly involved in the document development.  In this case, the vote was unanimous to go with CRDS.

Steven Rowley, Tiger Optics’ global product and sales manager for the semiconductor and LED markets, served as one of three members of the SEMI task force. He said, “With the adoption of CRDS as the standard, customers can now incorporate—in their test benches, as well as manufacturing facilities—a low-cost, compact, and simple instrument to monitor sub-ppb levels of moisture in their ultra-high purity gases going from their gas delivery systems to the process tools.” 

About Tiger Optics

Tiger Optics LLC makes laser-based gas analyzers that help advance science and industry with the world’s most powerful molecular analyzers. More than 1,600 robust Tiger units are at work in semiconductor fabrication plants, gas manufacturers, chemical companies and environmental monitoring, as well as 18 metrology institutes.