Ricor Cryogenic & Vacuum Systems, a manufacturer of semiconductor manufacturing equipment, has acquired fellow wafer equipment developer InnerSense Ltd. and as a result, expanded its activities from cryogenic equipment and purging solutions through to diagnostic systems.

InnerSense has developed the ‘Smart Wafer’ technology that provides engineers with the means to record the forces acting on a wafer as it is handled by wafer fabrication equipment. Such an approach delivers a significant yield boost as it provides a statistical monitoring method for abnormal mechanical events in IC manufacturing and can be used as a cornerstone of an intelligent maintenance programme (High Precision Maintenance).

Following the transaction, Ricor and InnerSense will be combining forces to extend the benefits of this technology to the global semiconductor and related markets.

Yigal Tomer and Erez Harel, InnerSense’s Co-CEO's, are pleased with the acquisition and explain, “It is very positive for InnerSense and for our customers and partners. InnerSense will continue to operate as an autonomous business unit within Ricor. Being part of a large company means we have now access to a much wider pool of resources and financial strength, enabling us to develop the best products for the upcoming challenges.”

“We believe this acquisition will enable us to leverage our sales and support organization and capitalize on our technical expertise to expand into an important high-growth segment of the market.”

InnerSense's core technology, the Smart Wafer system, is a revolutionary method for monitoring and troubleshooting the wafer handling equipment based on miniature vibration sensors that are mounted on a test wafer. This goes hand-in-hand with the operations of Ricor, which develops, manufactures and markets a wide range of advanced products and solutions ranging from Cryocoolers for Scientific Instrumentation & Vacuum Cryo Pumps, to Wafer Storage Purge Systems for the Semiconductor Industry.