Applied Energy Systems (AES), provider of high and ultra-high purity (UHP) gas systems, services, and solutions – including design, manufacturing, testing and installation, and expert field service ­– has unveiled its new Centurion™ fully automatic Mini Source System to support low volume gas applications.

The SEMI S2 compliant system combines SEMI-GAS’® ultra-high purity standard Centurion™ gas source manifold and GigaGuard™ CDM400 controller to safely and precisely deliver gases from small, lecture bottle sized cylinders.

Key design highlights of the system include a compact, wall-mounted design; a GigaGuard CDM400 controller with a 4.3” colour touchscreen; red, yellow, and green front-mounted LED lights and a high performance audible alarm; transducer-based pressure monitoring and an excess flow switch with user-specified set-points; a magnahelic and switch exhaust monitor and finally, a Z-Purge optional upgrade for Class I Division II compliance.

While the system can be tailored for array of gases and UHP application requirements, AES initially developed the 1-Cylinder Mini Source System to support a semiconductor customer’s mixed signal, connectivity, and embedded systems research and development.

Jim Murphy, General Manager of Applied Energy Systems, said, “We strive to be a value-add partner for our customers, from system design to system installation, and the Centurion Mini Source System is another example of how our expertise can be leveraged from end to end.”

“Not only did we help our semiconductor customer solve a specific delivery challenge– built upon our proven, premier SEMI-GAS products – but our Applied Services team also helped them get their system up and running quickly, minimising their process downtime and avoiding costly delays,” Murphy concluded.

AES SEMI-GAS Centurion Mini Source System

AES SEMI-GAS Centurion Mini Source System

Source: AES