An advanced precursor developed by Air Liquide’s teams has received an IC Industry Award at SEMICON Europa 2009.
To make increasingly efficient electronic devices, the semiconductor industry must rely on new chip materials.
Ruthenium is one such material poised to become a crucial element, particularly in data storage and memories.
Ruthenium is notably used in manufacturing new generation hard disk reading heads based on a novel physical effect, known as giant magnetoresistance.
To develop these new reading heads, as well as memories and other electronic components, Air Liquide Group’s research teams created and patented a new advanced precursor, ToRuSTM, which is used to deposit of very thin ruthenium layers only a few atoms thick.
Today, ToRuSTM is used by several of the group’s customers.
At SEMICON Europa 2009, held recently in Dresden, Germany, the results of votes cast by 25,000 professionals in the electronics industry were announced.
Air Liquide won the Enabling Material prize for its ToRuSTM. The award recognises inventions that allow for significant progress in electronic components manufacturing.