Air Products is to double its nitrogen trifluoride (NF3) capacity at its production facility in Ulsan, Korea. The new capacity is expected to be on-stream in the second half of 2012.
Air Products has been manufacturing and distributing NF3 for more than 30 years. The compound remains the chamber cleaning gas of choice for semiconductor, thin-film transistor liquid crystal display and thin-film photovoltaic manufacturers.
Wayne Mitchell, Vice President and General Manager of Electronics at Air Products commented on the expansion, “With the market for NF3 tight and the major OEMs committed to NF3 for their next generation processes, we felt the time was right to maximise our existing infrastructure and make this cost effective expansion.”
He continued, “We remain committed to the chamber cleaning business and plan on growing with our strategic customer and developing the products they need to produce the latest devices in consumer electronics.”
Besides Ulsan, Air Products operates three independent NF3 plants at its Electronic Specialty Materials manufacturing facility in Hometown, Pennsylvania. According to Air Products, its independent facilities in the US and Korea offer its customers significant security of supply.