BOC Edwards recently received a $17m order from Samsung Electronics for the supply of vacuum equipment.

The order will supply Samsung's generation 8 TFT-LCD fabrication plant in Tangjeong, South Korea.

Included in this contract is the supply of a diHK pumping system for harsh duty PECVD processes, a diFK pumping systems for load-lock applications, and STP magnetically levitated turbomolecular pumps for plasma etch tools.

Investment at the plant is primarily aimed at supplying the large area LCD-TV market.