BOC Edwards has announced its support of environmental manufacturing with the supply of multiple Zenith CVD integrated vacuum and abatement systems.
The systems will be provided to Japanese DRAM supplier Elpida Memory Inc which will install them in their new 300mm wafer fabrication facility, E300-Fab 2, scheduled for startup in December 2005.
The Zenith series provides fully-integrated abatement and vacuum pump solutions for treatment of toxic process exhaust gases and precursors in addition to handling high flows of hydrogen. The systems follow an earlier series of Zenith systems supplied for Elpida at the initial install phase of the site.
As Hiroshi Kasano, president and CEO of BOC Edwards Japan, said: \\$quot;A major consideration from Elpida was local support and the Zenith’s ability to address specific process requirements.
\\$quot;With space being at a premium in any 300 mm fab, the Zenith's small footprint was another key feature.\\$quot;
He added: \\$quot;The ability to rapidly install the Zenith is critical, reducing the time to first silicon.
\\$quot;An integrated approach delivers numerous benefits including enhanced safety and reduced cost of ownership compared to standalone abatement and pumping systems.\\$quot;
The Zenith CVD range is offered with a choice of modules that includes a thermal processor unit, a thermal conditioning system, and the Helios or Kronis abatement module to suit specific customer requirements.
For further information:
ELPIDA Memory Inc