Edwards Limited announced today that it has marked an important milestone with the shipment of its 1,000th EZENITH™ integrated vacuum and exhaust management system, which will ship to a US-based semiconductor manufacturing fab in October 2014.
According to Scott Balaguer, Edwards President of USA & European Sales, “The adoption of the EZENITH has been critical to the semiconductor manufacturing industry’s ability to achieve sustainable business practices. The shipment of the 1,000th system is an important landmark and cause for celebration. EZENITH systems are now installed in major fabs around the world, with numerous locations in Asia, Europe and North America.”
Balaguer adds, “One important feature of the EZENITH is its energy-saving green mode, which puts the system into a low-power state when wafers are not being processed. The green mode can provide up to 20 percent savings and is a critical feature for world-wide reduction of energy costs and associated greenhouse gas emissions.”
The EZENITH reduces footprint by 30% and reduces the exhaust pipe lengths by up to 60%, compared to the size and cost of separate pump and abatement systems, significantly reducing operating costs for semiconductor manufacturers. Installation for the EZENITH is also 60% faster, due primarily to the reduction by half of required utility connections; and simplified service of the integrated system further reduces the overall cost of ownership.
To optimise performance and efficiency, each EZENITH installation is customised to meet the customer’s process-specific pumping and abatement requirements. Identical configurations are then proliferated to identical processes throughout the facility to ensure consistent performance.
Balaguer adds, “Customisation of the EZENITH for our customers’ specific needs has been key to its wide-spread adoption. Edwards will design a system configuration that provides the specific options that each customer needs, using best known methods developed through our extensive experience with semiconductor manufacturing processes – it’s a complete and cost-effective solution.”