Dopant gases: Developments in storage and delivery


The electronics industry is entering a new period of clarity and confidence, gasworld understands, as it converges with conviction on the technology roadmaps of its future.

Like most other industries, however, the electronics sector is still under significant pressure to address increased process complexity, performance, and regulatory requirements.

The industrial and specialty gases industry is rising to the challenge in terms of product supply, but work is also underway to evolve the technology that stores and delivers these products and improve yield. More specifically, technology is available for the high performance delivery of dopant gases used in the final stages of semiconductor manufacture, in the ion implant processes.

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