Maintaining purity – Hydrocarbon gases in the semiconductor industry


Matheson explains why the use of hydrocarbon gases in the semiconductor industry has risen so rapidly in recent years.

Just 15 years ago, there were virtually no hydrocarbon gases used in the semiconductor industry. Gases were widely used in the manufacture of semiconductors, but these were reactants such as silane and ammonia, etching gases, dopant gases, gases for various cleaning steps, and inerting agents like nitrogen, argon, and helium.

As technology progresses, other gases have come to be used in semiconductor manufacturing. Today, this includes many hydrocarbon gases such as those produced at Matheson’s Palm Plant in Pennsylvania.

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