Air Liquide honoured for the 2005 Eurosemi IC industry’s materials improvement award out of four short listed companies.
The company was rewarded for its intense development effort for its Universal Plasma Abatement System (UPAS) at Semicon West show in San Francisco.
Air Liquide spokeswoman, Corinne Estrade-Bordy, said: “This is the first time for us to get an award from European Semiconductor.
“The award recognizes the intense development effort that was put together to master this new technology and our commitment to help our customers to reduce their environmental footprint and reach their emission reduction targets.”
Mrs Estrade-Bordy, continued: “As most of the voters were customers, the award also shows the viability of this technology and their satisfaction with the product.
Air Liquide has developed a way to use plasma to remove gaseous perfluorocarbons (PFC), which contribute to the greenhouse effect.
Last time the company has been honored was in 1997, when it received an award on related applications (PFC recycling) from R&D Magazine.
For further information:
Air Liquide plasma solution awarded
Universal Plasma Abatement System (UPAS)///Air Liquide