The Linde Group is investing in the expansion of existing products to improve business continuity planning (BCP), while adding new products with improved purity to meet the growing needs of sub-10nm semiconductor factories and advanced flat panel manufacturers.
The Tier One corporation is a global leader in rare gas and laser mixture production technology.
Linde has expanded capacity for fluorine/nitrogen (N2) mixture at Medford, Oregon, US, for etching and chamber cleaning applications.
- · This allows both low- and high-pressure fluorine and nitrogen mixture production.
- · On-site high-purity fluorine production minimizes third-party supply issues.
- · The product line is expanding to include fluorine/argon mixtures in place with tri-mix capability(fluorine/argon/nitrogen) later in 2018.
- · This facility complements fluorine mixture production at the Linde Alpha, New Jersey facility.
New precursors to meet customer requirements
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