Linde Electronics, the global electronic gases business of the German Linde Group, is to showcase a selection of gases and related technical solutions for its extensive range of customers, at Semicon West 2007.
From research and development through to large-scale production, the Linde Electronics business team will be available to discuss in more detail how its capabilities can benefit the semiconductor, electronic packaging, flat panel and solar cell manufacturers.
At the event the company will feature its modular, onsite fluorine generating system, which enables customers to produce high quality gas, supplied at low pressure and provides a quicker, more efficient process.
$quot;Fluorine is fast becoming manufacturers' first choice for cleaning chemical vapour deposition (CVD) chambers in wafer manufacturing. In addition to having zero impact on global warming, fluorine enables manufacturers to clean chambers more quickly, which reduces downtime and improves fab productivity,$quot; said Noel Leeson, president of the Linde Electronics business.
$quot;We work with customers around the world to develop solutions that enable them to maximize safety, productivity and product quality by using gases more effectively,$quot; Leeson added.
In addition, Linde Electronics will feature its Flex-ALDâ„¢ range of precursor formulations for atomic layer deposition (ALD), which is used to make ultra-thin and conformal thin-film structures for advanced semiconductor device applications. Linde's Flex-ALD formulations are designed to deposit very pure films and can reduce the cost and improve the efficiency of ALD processes by increasing precursor utilization, providing stable and consistent delivery without decomposition or condensation, and increasing film growth rates for higher tool throughput.
Semicon West 2007 will take place in San Francisco's Moscone Centre from 16-20th July.