Linde has started up a new Spectra high purity nitrogen generator in Shanghai, China to support the expansion of a leading semiconductor manufacturer in the ZhangJiang Hi-tech Park.
The industrial gas giant said its nitrogen will be used throughout the new semiconductor fabrication plant, supporting direct production process applications and the general purging and inerting of various semiconductor manufacturing systems.
The new plant, installed and operated by Linde’s joint venture Linde LienHwa (LLH), will also supply nitrogen via pipeline to existing customers in the industrial park.
“We have worked closely with our customer to expand the high purity gases infrastructure needed for their advanced wafer processing facilities”, said LLH China President, Stan Tang.
... to continue reading you must be subscribed
