Linde LienHwa (LLH), a member of The Linde Group, is continuing to invest in local production of electronic special gases (ESGs) to meet the growing demand of Taiwanese and regional customers in the semiconductor and display industries.

C4F8 purification at Taichung Harbour

”LLH’s capability for purification and filling of Octafluorocyclobutane (C4F8) in Taichung Harbour is outstanding in Taiwan,” according the the press release. With over 100 tonnes per year of capacity, LLH is positioned to meet demand in Taiwan as well as serve customers throughout Asia. An etching gas, C4F8 enables semiconductor manufacturers to cut chip patterns at leading-edge dimensions and also create the conduits through which several chips can be electrically connected. In addition, C4F8 is used to clean production chambers in predominantly older-sized semiconductor tools.

HCDS at Guanyin

Another step forward in Taiwan is LLH’s transfilling facility for Hexachlorodisilane (HCDS) in Guanyin, a district of Taoyuan City. The transfill process involves repackaging material into specialised stainless steel vessels while improving the purity and validating the quality. This LLH investment is sized to serve both Taiwan and customers throughout Asia. HCDS is used for depositing silicon compounds at very low process temperatures, which is important for making nanoscale electrical insulators in memory and logic processor chips.

LLH’s President said, “By investing in material processing in Taiwan, we are significantly reducing the supply chain risk and increasing material availability for our customers. These new facilities represent the latest phases in our commitment to expand ESG production in both Taiwan and China.”

LLH maintains one of the largest Taiwan-wide networks of on-site gas production, electronic bulk gases, ESGs, ultra-pure wet chemicals, chemical production and stocking facilities. The group offers a range of electronics materials that is among the best in the industry. Its products enable cutting-edge manufacturing in the semiconductor, solar, display and solid state lighting/LED industries.