Gas analysis expert Servomex has published a new paper which compares gas chromatography using plasma emissions detectors (GC-PED) with atmospheric pressure ionisation mass spectrometry for ultra-high-purity (UHP) gas analysis in the semiconductor industry.
Mass spectrometry and gas chromatography are both methods which offer ultra-trace gas analysis solutions for the quality assurance of gases used in the semiconductor manufacturing industry.
With its new expert paper, Servomex aims to provide readers with an in-depth look at the positive and negative factors of each method and examine the different performance factors for each method when used with continuous quality control instrumentation.
The GC-PED technology discussed in the paper is a key feature of Servomex’s new SERVOPRO NanoChrone ULTRA multi-gas analyser. The NanoChrome ULTRA is a flagship component of the new ULTRA Series of UHP gas analysers.
Servomex’s ULTRA Series is due to be launched at the upcoming Semicon Taiwan exhibition in Taipei between 23rd-25th September.
The full paper can be accessed here.