Voltaix, LLC, a leading manufacturer of specialty materials for the Semiconductor and photovoltaic industries, and Air Liquide, a world leader in gases for industry, health and the environment have announced the signing of an agreement to expand Trisilylamine (TSA) capacity with the construction of two new plants.

The two new TSA production facilities will be located at Voltaix’s recently constructed state-of-the-art manufacturing sites in Upper Mount Bethel Township, Pennsylvania, USA, and in Yeongi-gun, Choongchung, Nam Do, South Korea, to meet global market demand and enable strong supply contingencies.

Air Liquide’s Vice President of Electronics World Business Line, Francisco Martins, commented on the deal, “The Semiconductor industry’s most advanced customers will be pleased to hear about the expanded cooperation between Voltaix and Air Liquide Electronics, which provides them with a reliable TSA supply chain solution globally for the years to come.”

Peter Smith, Voltaix CEO, responded to the news. He said, “Through years of dedicated research, Voltaix is able to successfully scale TSA manufacturing to meet the increasing demands of the semiconductor industry.”

“TSA is a highly versatile chemical that is finding numerous applications owing to its unique properties. We are fortunate to have a high caliber partner in Air Liquide with experience and expertise in the development of CVD and ALD processes and precursors,” added Smith.

TSA is a versatile silicon precursor molecule used in a variety of disruptive front-end Semiconductor applications. It is used in the production of advanced memory and microprocessor chips, where TSA usage is scheduled to grow sharply as device size shrinks to the 20nm technology node generations and below.

With ten years of TSA experience, Voltaix will integrate its expertise into these new state-of-the-art plants, expected to be in operation over the next 12 to 18 months.

Air Liquide will increase its ultra-high purification capacity at its ALOHA™ manufacturing centres as well as set-up the necessary handling, quality control and logistics infrastructure to support this growth.

Air Liquide’s Vice President of Electronics remarked, “TSA has undergone a fascinating journey, from the inception of the molecule, its early process development efforts, collaborations with OEMs and eventually its market introduction. Voltaix has been our long-standing and valued partner to bring TSA to market, and this agreement seals the continuation of our successful venture for this enabling molecule.”