By JJ Koczan2016-01-18T18:20:00+00:00
Pfeiffer Vacuum will be exhibiting at the Semicon Korea Trade Fair in Seoul from Jan. 27-29 and Semicon China in Shanghai from March 15-17. The company will have experts on hand to discuss vacuum offerings with attendees at both events.
“We are pleased to present important new vacuum solutions at the trade fairs Semicon Korea and Semicon China. In an increasingly changing competitive environment, Pfeiffer Vacuum is ideally set up as a rock-solid company, acting in the global arena as a reliable, long-term all-around provider of vacuum technology for customers all over the world,” says Eric Taberlet, President of the Business Unit Semiconductor and Coating.
A4 dry pumps
Among other products available, Pfieffer Vacuum will showcase its A4 series of dry pumps.
The dry, multi-stage Roots pumps in the A4 series provide pumping speeds of 100 to 2,300 m3/h. These energy-efficient and reliable pumps are ideal for use in demanding processes in the semiconductor and coating industries. With corrosion resistant materials and a high gas throughput, this pump series is optimally suited for use in CVD processes, for example.
The company is launching a new analogue measurement device, called the CenterLine Series – for use in ultra-high vacuum to the over pressure range. It is also easily integrated into existing systems.
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