SAES Pure Gas Inc. has announced the expansion of its Microcontamination Inspection Service, creating an additional sampling system dedicated to Cleanroom Air and Chemical Filter Tool Certification.

In addition to the current CollectTorr sampling system for pressurised gases, the Ambient Air CollectTorr has been developed to provide semiconductor equipment manufacturers and semiconductor tool end-users a dedicated, simple, and reliable tool for molecular contaminant certification in ambient air.

Using proprietary solid-state traps, the Ambient Air CollectTorr can provide parts per trillion (pptV) level measurements of molecular acids, bases, refractory and organic contaminants.

Features of the new Ambient Air CollectTorr sampling system include its compact self-contained design, easy installation and operation, suitability for mounting in any orientation, and no utilities required.

“We are excited to bring our well established solid-state sampling technology and analytical expertise to the cleanroom and chemical filter molecular contamination certification field,” said Cristian Landoni, SAES Pure Gas Point-of-Use Product Manager.

“A reliable molecular contamination certification is mandatory to maintain the warranty of the optics in lithography and metrology tools. This certification allows customers of lithography and metrology tools to analyze their purifier and active filter configuration. The Ambient Air CollectTorr system also provides a huge advantage over standard liquid impingers for molecular acids and bases sampling,” concluded Landoni.

Pioneering the development of the getter technology, SAES Getters Group is the world leader in a variety of scientific and industrial applications where stringent vacuum conditions or ultra high pure gases are required.

The group also holds a leading position in ultra pure gas handling for the semiconductor and other hi-tech markets with SAES Pure Gas Inc.