SEMI-GAS® has introduced the latest offering developed through its Applied Solutions custom-engineering process, designed for handling ultra high purity liquids.
The Xturion® Liquid Push Delivery System (LPX) is a fully automatic system for the precise delivery and handling of ultra high purity liquids.
Operated by a GigaGuardTM PLC controller, it features an intuitive 9-inch colour touchscreen and user-definable alarms and set points.
LPX delivers ultra high purity liquids using an inert push gas, which doubles to support the system’s automatic purge processes. Built in accordance with SEMI-S2 standards and helium leak tested to 1.0 x 10-8 Atm-cc/sec, the system is also equipped with a number of safety features including vent line liquid leak sensors, an EMO button, and remote monitoring and shutdown functionality.
Other features include flexibility in system configuration and flow capacity, for optional wall mount and/or rack mount applications, as well as standard and higher volume applications.
Jim Murphy, General Manager of Applied Energy Systems, commented, “The Xturion™ Liquid Push Delivery System is another example of our engineering innovation applied to solve a customer’s unique challenge, in this case related to high flow liquid delivery.”
“While this system was initially developed to suit a specific need presented by a specific customer, we see the applicability of such a product in many other industry processes and production environments that use ultra high purity liquids. With that in mind, we designed the system with inherent flexibility, so that it can be easily tailored to address the particular needs of any customer seeking the safety, quality, and performance of the SEMI-GAS® brand for ultra high purity liquid delivery.”