The new Munich Trade Fair Centre in Germany was the location for the 2005 SEMICON® Europa, with 30 Standardisation meetings taking place from the 11-14 April.

SEMICON Europa is the platform for equipment, materials suppliers and services providers to the semiconductor industry. From exhibiting and networking on the show floor to attending one of the various business or technical conferences, seminars or workshops running in parallel, or through organizing a press conference, SEMICON Europa offers various communication channels to get your voice heard and develop ‘your’ market intelligence.

SEMICON Europa also serves as the preferred industry venue to advance semiconductor-manufacturing standards. With over 700 published standards, there is a need for condensation and uniformity. More than 30 SEMI International Standards events, including workshops and Standards Technical Education Programs (STEP) were held during that week. The focus this year was on Automation, Energy Conservation and Silicon Wafer substrate issues.

Gases and liquid chemicals are two of the segments covered by SEMI Standards. The SEMI Standards Gases & Liquid Chemicals committee had its meeting at SEMICON Europa 2005 on 13 April. The attendance was good according to the Committee with 33 individuals taking part.

Standards Committee Meeting ///Photo courtesy of the SEMI Organisation

Of particular interest was a free mini-workshop on Analytical Technologies that featured the following three presentations:

The Use of CRDS for Measurement of Sub ppm/ppb Moisture in Hydrides - Wen-Bin Yan, Tiger Optics

Cavity Ring-Down Spectroscopy is used for ultra-high-sensitive trace gas measurements not only in inert and passive host gases, but also in some specialty gases. The presentation covered the most recent applications of CRDS in moisture measurement in specialty gases, in particular, in ammonia carrier gas.

In-Line Detection and Measurement of Elemental and Molecular Contamination in Semiconductor Processing Solutions - Bob McDonald, Metara

Metara made for the first time in Europe a public presentation about the trace contamination analyzer that they developed that offers the capability for fully automated in-line monitoring of wafer cleaning solutions and other process chemistries.

Method Detection Limits and the Statistical Treatment of Censored Trace Data - Tom Bzik, Air Products

Tom Bzik, the lead statistician of Air Products, travelled from the USA to present, for the first time in Europe, the SEMI Standard C10 \\\\$quot;Method Detection Limit\\\\$quot;. Anyone involved in chemical analysis and dealing with the \\\\$quot;detection limit\\\\$quot; dilemma was likely to be interested in this presentation.

The presentations, and many others, are free and available upon request from Carlos Lee, Standards Manager for SEMI Europe, clee@semi.org
SEMI Standards meetings take place in Europe, North America and Japan and meetings are open to all interested parties. There are about 65 SEMI Standards related to gases and concerned with gaseous impurity content, metallic impurity content, particle impurity content, and many others include detailed analytical methods. Standards are available for all major gases used in the semiconductor industry, for bulk gases e.g. Ar, N2, H2 and O2, for cylinder gases e.g. He, BCl3, BF3, HCl etc. and for different grades of a specific gas. More information is available on www.semi.org/standards


For a complete list of standards during SEMICON Europa 2005

Semicon Europa 2005

And for SEMI Standards activities worldwide:

Semi Standards