French industrial gases giant Air Liquide was present at recent the SEMICON Korea 2009 event, demonstrating its ‘cutting-edge’ research and technology for the ongoing development of the semiconductor industry.
At SEMICON Korea 2009, which was held from 20th – 22nd January, Air Liquide presented its TORUSTM product to its main electronics customers, the first ruthenium precursor industrially produced and used.
Resulting from the collaboration between the group’s research teams and its customers, the advanced precursor makes possible very high quality ruthenium deposits, while also decreasing the cost of electronic components.
In 2008, Air Liquide had already successfully launched ZyALD, an advanced zirconium precursor.
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