French industrial gases giant Air Liquide was present at recent the SEMICON Korea 2009 event, demonstrating its ‘cutting-edge’ research and technology for the ongoing development of the semiconductor industry.

At SEMICON Korea 2009, which was held from 20th – 22nd January, Air Liquide presented its TORUSTM product to its main electronics customers, the first ruthenium precursor industrially produced and used.

Resulting from the collaboration between the group’s research teams and its customers, the advanced precursor makes possible very high quality ruthenium deposits, while also decreasing the cost of electronic components.

In 2008, Air Liquide had already successfully launched ZyALD, an advanced zirconium precursor.

Materials must develop
To make increasingly efficient electronic components, the semiconductor industry must constantly change the materials that comprise semiconductors.

Ruthenium is notably used in the manufacture of high-capacity hard drives - indispensable due to the growing amount of data to be saved, notably generated for the general public by the arrival of digital photos and videos.

To meet the needs of the endless evolutions in the world of electronics, Air Liquide has continued to ‘mobilise its resources in cutting-edge research to supply its electronics industry customers with the customized innovative solutions they need’.

The company’s electronics business, which has 3,000 employees, recorded revenues of€ 944m in 2007, with sales mostly comprised of ultra-pure gases, specialty gases, new molecules, equipment for the use of these products, and customised services. Air Liquide has also set-up an electronics division in Tokyo, to closely support and benefit from the boom of the semiconductor, TFT-LCD, and photovoltaic sectors in Asia.