Air Products’ new electronics facility in Korea has completed start-up and is successfully online. The products from this facility will enable semiconductor manufacturers to create advanced generation devices.
John Langan, Director of Technology and Electronics for Air Products explained, “The new materials produced at our Banwol facility, such as our AP-LTO® and AP-LTN® product lines, will enable deposition of silicon nitride and oxide films by Atomic Layer Deposition, Plasma Enhanced Atomic Layer Deposition, and Chemical Vapor Deposition for a variety of emerging applications including spacers, sacrificial films, protection layers, etch stops and diffusion barriers.”
The materials manufactured at the Banwol facility will be incorporated into devices like NAND Flash memory for portable electronics, DRAM to boost computer operating systems, advanced logic applications, and telecom applications like smart phones. According to the North American industrial gas firm, Air Products’ new materials are developed and tested for performance with, and supplied to, industry leading tool suppliers and semiconductor manufacturers.
Corning Painter, Vice President and General Manager for Air Products conveyed the importance of the move. He said, “Air Products is excited to be investing in the next generation materials our customers need to help develop cutting-edge portable devices, such as smartphones and tablet computers, now entering the market.”
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