Air Products recently announced it will construct a nitrogen trifluoride (NF3) plant in Ulsan, Korea to support the fast growing Asian semiconductor and liquid crystal display (LCD) markets.
The new production facility will be operated by Air Products Korea Electronics and will be constructed at the company’s existing specialty gas site in Ulsan. The first phase of the new plant will produce in excess of 500 metric tons per year and will be completed in late 2007.
This will be the company’s second Electronic Specialty Material (ESM) investment at Ulsan after bringing on-stream an ultra-high purity ammonia plant in 2005.
NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. NF3 is stable and non-flammable, making it a safe gas to transport, store and deliver to customers around the world.
... to continue reading you must be subscribed