An introduction to…Onsite fluorine


$quot;You can mitigate something with a high global warming potential but if your alternative is a zero global warming potential, it is fundamentally better.”

Those are the words of Dean O’Connor, Head of Electronics Market Development and Technology at Linde, as he exclusively spoke to gasworld in October 2008.

Readers of our magazine will no doubt be aware of buzzwords like ‘onsite fluorine’ or simply ‘F2’ as this electronics gas solution continues to gain prominence throughout our industry and beyond. But what is onsite fluorine generation? And why is it becoming so important?

Put simply, high purity fluorine gas is the highest performance cleaning gas available, improving productivity in the electronics sector on CVD tools, reducing energy consumption and environmental impact, and boasting zero Global Warming Potential (GWP).

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