Chart Industries and Edwards partner on carbon capture solutions for the semiconductor industry


Vacuum products developer Edwards has joined forces with Chart Industries to develop carbon capture solutions for the semiconductor industry.

Sealed with a Memorandum of Understanding (MoU), the partnership will look to combine Chart’s carbon capture process technology with Edwards’ sub fab equipment for the semiconductor market.

Specifically, Chart’s Cryogenic Carbon Capture™ technology will be put under the spotlight. The post-combustion technology captures up to 99% of emissions from several industries.

Jill Evanko, CEO and President of Chart Industries, said, “We anticipate that our companies’ complementary capabilities for bringing carbon capture technologies and semiconductor industry-enabling solutions will accelerate customers’ decisions to enhance sustainability.”

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