Back in 2009, Chart Ferox was asked to lend its talents to the installation of a tank storage system for liquid monosilane (SiH4) at Schmid Silicon Technology’s pilot plant on-site at Schwarze Pumpe in Germany, Western Europe.
Having received the order itself, CRYOTEC Anlagenbau GmbH chose Chart for the construction and development of the vacuum insulated storage tanks, atmospheric vaporisers and vacuum insulated pipes for the project.
The tank storage system, the world’s first system of this scale, was planned to consist of six separate systems, each with a liquid storage capacity of 6300 litres of liquid monosilane complete with cryogenic tanks, special armatures, vaporisers and vacuum insulated piping system.
The development of the concept for this tank storage system posed a unique challenge for all participating companies, especially because of the highly explosive nature of monosilane and all the requirements concerning high-purity monosilane.
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