Air Liquide honoured for the 2005 Eurosemi IC industry’s materials improvement award out of four short listed companies.
The company was rewarded for its intense development effort for its Universal Plasma Abatement System (UPAS) at Semicon West show in San Francisco.
Air Liquide spokeswoman, Corinne Estrade-Bordy, said: “This is the first time for us to get an award from European Semiconductor.
“The award recognizes the intense development effort that was put together to master this new technology and our commitment to help our customers to reduce their environmental footprint and reach their emission reduction targets.”
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