China-based Suzhou Oxygen Plant Co., Ltd. (SOPC) has started up a new nitrogen plant that will produce high purity nitrogen and high purity liquid oxygen (LOx) to supply critical gases for Shanghai’s semiconductor industry.
Having passed a performance test on 21st May 2022, commissioning of the dual-column air separation unit (ASU) coincided with the outbreak of Covid-19 in Shanghai last April (2021) and the Chinese New Year holiday, presenting unique challenges for SOPC and its client.
Under the contract, the plant is to produce 8000 Nm3/h (normal cubic metres per hour) high purity nitrogen and 140 Nm3/h high purity LOx, in addition to meeting specified flowrates and purity levels.
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