Air Products and Showa Denko have extended their 10 year joint venture for etch and chamber cleaning products by building a new facility in Kawasaki, Japan, to manufacture hexafluoride butadiene (C4F6).
Showa Denko Air Products Co. Ltd (SDAP) was formed in 1996 to capitalise on Air Products’ fluorine handling capabilities and Showa Denko’s technical and operating expertise in large-scale perfluorocarbon production facilities.
Since 1997, when SDAP built a production facility for products such as tetrafluoromethane (CF4) and hexafluoride (C2F6) in Kawasaki, it has undertaken three expansions to more than double capacity at the plant.
CF4 and C2F6 remain reliable and cost competitive etch and chamber cleaning gases. Additonally, as logic and memory device manufacturing transitions to smaller geometries, higher aspect ratio dielectric etching will utilize more C4F6 because of the unique performance properties it exhibits within state-of-the-art high-density plasma etching processes.
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