Praxair Chemax Semiconductor Materials Co., a joint venture between Praxair and China Petrochemical Development Corp, has announced that it will double the transfill production of silane in their Toufen, Taiwan facility.
The increase in capacity is the result of the growing demand for silane in the production of TFT-LCD (Thin Film Transistor-Liquid Crystal Display) technology as well as at 300mm semiconductor wafer fabs in the region.
“This expansion will allow us to meet the new requirements of our key customers and provide Praxair Chemax with the capability to maintain our leading position in this product. We are committed to providing world-class silane supply in all areas “ capacity, safety, quality and delivery equipment,” said Joyce Chen, president of Praxair Chemax Semiconductor Materials Co., Ltd.
Praxair also supports the Taiwan region with an operations centre located near the Tainan Science Park, which offers technical support as well as just-in-time delivery of such products as silane, ammonia, phosphine, arsine, and nitrogen trifluoride.
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