SEMI-GAS® unveils new ultra high purity liquid push system


SEMI-GAS® has introduced the latest offering developed through its Applied Solutions custom-engineering process, designed for handling ultra high purity liquids.

The Xturion® Liquid Push Delivery System (LPX) is a fully automatic system for the precise delivery and handling of ultra high purity liquids.

Operated by a GigaGuardTM PLC controller, it features an intuitive 9-inch colour touchscreen and user-definable alarms and set points.

LPX delivers ultra high purity liquids using an inert push gas, which doubles to support the system’s automatic purge processes. Built in accordance with SEMI-S2 standards and helium leak tested to 1.0 x 10-8 Atm-cc/sec, the system is also equipped with a number of safety features including vent line liquid leak sensors, an EMO button, and remote monitoring and shutdown functionality.

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