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servomex-releases-new-paper-to-compare-technologies-for-uhp-gas-analysis-in-the-semiconductor-industry
servomex-releases-new-paper-to-compare-technologies-for-uhp-gas-analysis-in-the-semiconductor-industry

Servomex releases new paper to compare technologies for UHP gas analysis in the semiconductor industry

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Gas analysis expert Servomex has published a new paper which compares gas chromatography using plasma emissions detectors (GC-PED) with atmospheric pressure ionisation mass spectrometry for ultra-high-purity (UHP) gas analysis in the semiconductor industry.

Mass spectrometry and gas chromatography are both methods which offer ultra-trace gas analysis solutions for the quality assurance of gases used in the semiconductor manufacturing industry.

With its new expert paper, Servomex aims to provide readers with an in-depth look at the positive and negative factors of each method and examine the different performance factors for each method when used with continuous quality control instrumentation.

The GC-PED technology discussed in the paper is a key feature of Servomex’s new SERVOPRO NanoChrone ULTRA multi-gas analyser. The NanoChrome ULTRA is a flagship component of the new ULTRA Series of UHP gas analysers.

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