Servomex releases new paper to compare technologies for UHP gas analysis in the semiconductor industry


Gas analysis expert Servomex has published a new paper which compares gas chromatography using plasma emissions detectors (GC-PED) with atmospheric pressure ionisation mass spectrometry for ultra-high-purity (UHP) gas analysis in the semiconductor industry.

Mass spectrometry and gas chromatography are both methods which offer ultra-trace gas analysis solutions for the quality assurance of gases used in the semiconductor manufacturing industry.

With its new expert paper, Servomex aims to provide readers with an in-depth look at the positive and negative factors of each method and examine the different performance factors for each method when used with continuous quality control instrumentation.

The GC-PED technology discussed in the paper is a key feature of Servomex’s new SERVOPRO NanoChrone ULTRA multi-gas analyser. The NanoChrome ULTRA is a flagship component of the new ULTRA Series of UHP gas analysers.

... to continue reading you must be subscribed

Subscribe Today

To access hundreds of features, subscribe today! At a time when the world is forced to go digital more than ever before just to stay connected, discover the in-depth content our subscribers receive every month by subscribing to gasworld.

Please wait...