US gas analyser manufacturer Tiger Optics will introduce two new products to monitor airborne molecular contaminants, as well as displaying its moisture analyser, at the SEMICON Europa show next week.
The Pennsylvania-based corporation’s newest HALO quite reduced pressure (QRP) moisture analyser was developed for manufacturers using low-temperature epitaxy (LT-Epi). With the shift to lower and lower deposition temperatures and pressures, moisture has become the main culprit in oxide defects. The HALO QRP can monitor each process step and report real-time moisture concentration to the tool control system. The HALO QRP easily operates at one torr or less, in comparison to the company’s HALO RP, which is limited to 50 torr.
At SEMICON Europa, the company will also unveil its new state-of-the-art mobile cart to package its analysers for cleanroom environments. The AMC Cart can easily accommodate up to four T-I Max analysers, with two fitting comfortably in each of two standard 19” racks.
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