Versum Materials and NuMat Technologies reveal technology agreement


Versum Materials, Inc. and NuMat Technologies have announced a global, commercial agreement to offer a new line of products for the safe storage and delivery of dopant gases such as arsine, phosphine and boron trifluoride.

The new product line is called ION-X® and is based on revolutionary Metal Organic Frameworks (MOFs) which can selectively absorb, store and safely deliver ultrahigh purity gases at sub-atmospheric pressures.

ION-X® offers performance advantages over traditional carbon-based absorbent technology used in the ion implant processes for the manufacture of semiconductor devices.

... to continue reading you must be subscribed

Subscribe Today

Paywall Asset Header Graphic

To access hundreds of features, subscribe today! At a time when the world is forced to go digital more than ever before just to stay connected, discover the in-depth content our subscribers receive every month by subscribing to gasworld.

Please wait...