Loading...
Loading...
tiger-optics-to-showcase-new-products-at-semicon-europa
tiger-optics-to-showcase-new-products-at-semicon-europa

Tiger Optics to showcase new products at SEMICON Europa

0

US gas analyser manufacturer Tiger Optics will introduce two new products to monitor airborne molecular contaminants, as well as displaying its moisture analyser, at the SEMICON Europa show next week.

The Pennsylvania-based corporation’s newest HALO quite reduced pressure (QRP) moisture analyser was developed for manufacturers using low-temperature epitaxy (LT-Epi). With the shift to lower and lower deposition temperatures and pressures, moisture has become the main culprit in oxide defects. The HALO QRP can monitor each process step and report real-time moisture concentration to the tool control system. The HALO QRP easily operates at one torr or less, in comparison to the company’s HALO RP, which is limited to 50 torr.

At SEMICON Europa, the company will also unveil its new state-of-the-art mobile cart to package its analysers for cleanroom environments. The AMC Cart can easily accommodate up to four T-I Max analysers, with two fitting comfortably in each of two standard 19” racks.

... to continue reading you must be subscribed

Subscribe Today

Paywall Asset Header Graphic

To access hundreds of features, subscribe today! At a time when the world is forced to go digital more than ever before just to stay connected, discover the in-depth content our subscribers receive every month by subscribing to gasworld.

Please wait...