Edwards Vacuum, a developer and manufacturer of vacuum system products, unveiled two new vacuum pump products at the SEMICON® event taking place in China this week.

The UK-based business introduced the iXM Series for semiconductor etch and chemical vapour deposition (CVD) applications, and the iXL900R for fast pump down of large flat panel display (FPD) loadlock chambers.

The first offering, the iXM Series of dry pumps, reduces environmental impact and customer costs for etch and CVD processes with low energy consumption and ambient noise levels. The pumps are specifically designed to deliver increased lifetime when used for highly corrosive etch processes.

Edwards vacuum i xl900r

Edwards Vacuum iXL900R

The second invention to be revealed, the iXL900R (pictured left), is the fastest loadlock pump currently available in its class for FPD loadlock applications. Its aim is to reduce operation costs and installation times and is particularly suited to large loadlock chambers used for PVD applications.

Ma Zhen, China-based Applications Manager, underlined, “We are proud to offer our customers new solutions that help them reduce their energy use. By some estimates, as much as 40% of energy used in a semiconductor factory is consumed by vacuum pumps, so even a minor reduction in this area can have a significant effect on total energy consumption.”

“Our latest vacuum pumps offer improvements in overall energy efficiency and savings from a unique idle mode that reduces energy usage when full power is not required.”

Currently, various sponsored incentives from the Chinese government are providing manufacturers with opportunities to upgrade their capabilities and to reduce their energy consumption with minimal investment.


SEMICON China is a 3-day event being held from 15th-17th March at the Shanghai New International Expo Centre (SNIEC), showcasing a wide range of products from industries such as electronics and electrical goods and industrial products.