Versum Materials, Inc. has introduced its new GASGUARD® eV Temperature Control System, designed to deliver reliable fabwide heat sourcing and control of electronic specialty gases that require heating to maintain or increase flow.
The new system integrates the GASGUARD gas delivery technology with an ECC heater/controller, two blankets and two heat traces, to deliver an integrated platform that can eliminate the concerns and time of specifying, installing and commissioning third-party equipment.
The system also allows fabs to scale their manufacturing with the assurance that the components of the delivery system will not need to be upgraded or replaced.
The GASGUARD eV system’s newly redesigned heater blanket has single-piece construction for both the heater and insulation, dual voltage (120V or 208-240V supply) and over-temperature protection reliability via redundant bimetallic switches for more precise delivery of heated gases to the fabrication tools.
Versum has expanded the integrated monitoring and control links between the heater/controller and AP11 controller to encompass benchmark gas delivery control that provides users with enhanced uptime, simplified troubleshooting and increased controller reliability.