Atlas Copco has completed the acquisition of Brooks’ Semiconductor Business which was announced in August (2018).

Atlas Copco to acquire the cryogenic business of Brooks Automation

The acquisition includes cryo pump operations located in Chelmsford, US and Monterrey, Mexico, a worldwide sales and service network, and Brooks Automation’s 50% share of Ulvac Cryogenics, Inc.

The acquired business will expand Atlas Copco’s technology offering to customers in the semiconductor and general vacuum industries through the Edwards business, a brand in the Atlas Copco Group.

The acquisition complements Atlas Copco’s technology portfolio with a new range of high vacuum pumps which optimise the removal of water vapour and hydrogen.

A new division in the Vacuum Business Area named Semiconductor Solutions will be created to increase the focus on expanding Atlas Copco’s chamber solutions offering to customers in the semiconductor and flat panel display markets.

The new division will be headquartered in Chelmsford, US.